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class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-868\" src=\"https:\/\/www.naxau.cn\/wp-content\/uploads\/2020\/02\/\u53cc\u78c1\u63a7\u7ba1\u9634\u6781\u7ed3\u6784.jpeg\" alt=\"\u53cc\u78c1\u63a7\u7ba1\u9634\u6781\u7ed3\u6784\" width=\"614\" height=\"328\" srcset=\"https:\/\/www.naxauam.com\/wp-content\/uploads\/2020\/02\/\u53cc\u78c1\u63a7\u7ba1\u9634\u6781\u7ed3\u6784.jpeg 614w, https:\/\/www.naxauam.com\/wp-content\/uploads\/2020\/02\/\u53cc\u78c1\u63a7\u7ba1\u9634\u6781\u7ed3\u6784-300x160.jpeg 300w\" sizes=\"(max-width: 614px) 100vw, 614px\" \/><figcaption>\u56fe2.\u53cc\u78c1\u63a7\u7ba1\u9634\u6781\u914d\u7f6e[1]\u3002<\/figcaption><\/figure>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-307\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img3.jpeg\" sizes=\"(max-width: 516px) 100vw, 516px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img3.jpeg 516w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img3-300x223.jpeg 300w\" alt=\"\" width=\"516\" height=\"384\" 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100vw, 392px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img4.jpeg 392w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img4-295x300.jpeg 295w\" alt=\"\" width=\"392\" height=\"398\" 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class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-309\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_table1.jpeg\" sizes=\"(max-width: 767px) 89vw, (max-width: 1000px) 54vw, (max-width: 1071px) 543px, 580px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_table1.jpeg 788w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_table1-300x244.jpeg 300w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_table1-768x626.jpeg 768w\" alt=\"\" width=\"788\" height=\"642\" 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[10,11]\u6240\u793a\u3002\u6700\u521d\uff0c\u4e0e\u91d1\u5c5e\u9776\u6750\u7684\u8868\u9762\u53cd\u5e94\u4f1a\u6d88\u8017\u5927\u91cf\u7684\u53cd\u5e94\u6c14\u4f53\u3002\u53cd\u5e94\u9971\u548c\u540e\uff0c\u76ee\u6807\u8868\u9762\u5c06\u88ab\u6c27\u5316\u4e14\u4e0d\u4f1a\u6d88\u8017\u989d\u5916\u7684\u53cd\u5e94\u6027\u6c14\u4f53\uff0c\u56e0\u6b64\uff0cO<sub>2<\/sub>\u5373\u4f7f\u5728\u6d41\u91cf\u8f83\u4f4e\u65f6\uff0c\u5206\u538b\u4e5f\u4f1a\u589e\u52a0\u3002\u53d1\u751f\u8fd9\u79cd\u60c5\u51b5\u65f6\uff0c\u6c89\u79ef\u901f\u7387\u4f1a\u5927\u5927\u964d\u4f4e\u3002\u4e00\u65e6\u76ee\u6807\u5b8c\u5168\u4e2d\u6bd2\uff0cO\u00a0<sub>2\u7684<\/sub>\u5206\u538b\u5c06\u968f\u6d41\u91cf\u7ebf\u6027\u589e\u52a0\u3002\u5728\u8fd9\u79cd\u60c5\u51b5\u4e0b\uff0c\u6d41\u91cf\u63a7\u5236\u548c\u6c89\u79ef\u8fc7\u7a0b\u5e94\u5728\u8d1f\u659c\u7387\u533a\u57df\u5185\u3002<\/p>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-310\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img5.jpeg\" sizes=\"(max-width: 546px) 100vw, 546px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img5.jpeg 546w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img5-300x192.jpeg 300w\" alt=\"\" width=\"546\" height=\"350\" \/><figcaption>\u56fe5.\u7528\u4e8e\u53cd\u5e94\u6e85\u5c04\u7684\u78c1\u6ede\u56de\u7ebf\u793a\u4f8b[10<\/figcaption><\/figure>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-311\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img6.jpeg\" sizes=\"(max-width: 514px) 100vw, 514px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img6.jpeg 514w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img6-300x224.jpeg 300w\" alt=\"\" width=\"514\" height=\"384\" 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class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-315\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img10.jpeg\" sizes=\"(max-width: 528px) 100vw, 528px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img10.jpeg 528w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img10-300x218.jpeg 300w\" alt=\"\" width=\"528\" height=\"384\" \/><figcaption>\u56fe10.\u901a\u8fc7\u53cc\u78c1\u63a7\u6e85\u5c04\u6c89\u79ef\u7684SiO2 \/ Al2O3\u51cf\u53cd\u5c04\u6d82\u5c42\u7684\u53cd\u5c04\u5149\u8c31[9]\u3002<\/figcaption><\/figure>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-316\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img11.jpeg\" sizes=\"(max-width: 502px) 100vw, 502px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img11.jpeg 502w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img11-300x182.jpeg 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TiN \/ TaNx\u8584\u819c\u4e2d\u7684\u5e94\u529b\u4e0e\u5c42\u539a\u5ea6\u548c\u603b\u538b\u529b\u7684\u5173\u7cfb[13]\u3002<\/figcaption><\/figure>\n<p>\u53cc\u78c1\u63a7\u7ba1\u548c\u4e2d\u9891\u6e85\u5c04\u7684\u793a\u4f8b\u5217\u8868\u53ef\u4ee5\u586b\u5145\u51e0\u4e2aBlog\u3002\u4f7f\u7528RF\u4ee5\u53ca\u4e2d\u9891\u7535\u6e90\u6765\u6c89\u79ef\u8584\u819c\u3002\u5f53\u9634\u6781\u5e76\u6392\u653e\u7f6e\u65f6\uff0c\u9634\u6781\u78c1\u6027\u7684\u76f8\u4e92\u4f5c\u7528\u4e5f\u53ef\u80fd\u6210\u4e3a\u4e00\u4e2a\u95ee\u9898[1]\u3002\u6bcf\u79cd\u60c5\u51b5\u90fd\u4e0d\u540c\uff0c\u5fc5\u987b\u6839\u636e\u6240\u9700\u7684\u57fa\u6750\u51e0\u4f55\u5f62\u72b6\uff0c\u6210\u5206\u548c\u6027\u80fd\u8c03\u6574\u9634\u6781\u914d\u7f6e\u3002<\/p>\n<hr \/>\n<p>\u8f6c\u81f3http:\/\/vtcmagblog.com\/<\/p>\n<h3>\u53c2\u8003\uff1a<\/h3>\n<ol>\n<li>U Heister et al., 41st Annual Technical Conference Proceedings of the Society of Vacuum Coaters (1998) 187.<\/li>\n<li>T Winkler, 45th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (2002) 315.<\/li>\n<li>D H Trinh et al., J. Vac. Sci. Technol. A 24(2) (2006) 309.<\/li>\n<li>W \u2013M Gnehr et al., 48th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (2005) 312.<\/li>\n<li>D J Christie et al., 46th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (2003) 393.<\/li>\n<li>L Lou et al, Advanced Energy Industries, Inc. Whitepaper.<\/li>\n<li>R DeGryse et al., VT&amp;C February 2008, 48.<\/li>\n<li>W D Sproul, 36th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (1993) 504.<\/li>\n<li>J Strumpfel et al., 40th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (1997) 179.<\/li>\n<li>W D Sproul et al., J. Vac. Sci. Technol. A 13(3) (1995) 1198.<\/li>\n<li>W D Sproul and B E Sylvia, VT&amp;C, 2(8) (2001) 32.<\/li>\n<li>A I Rogozin et al., J. Vac. Sci. Technol. A 22(2) (2004) 349<\/li>\n<li>M Nordin et al., J. Vac. Sci. Technol. A 18(6) (2000) 2884.<\/li>\n<\/ol>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u9ad8\u6c89\u79ef\u901f\u7387\u548c\u9776\u6750\u5229\u7528\u7387\u5bf9\u4e8e\u5de5\u4e1a\u8fc7\u7a0b\u975e\u5e38\u91cd\u8981\u3002\u5c3d\u7ba1\u78c1\u63a7\u7ba1\u9634\u6781\u7684\u6c89\u79ef\u901f\u7387\u76f8\u5bf9\u8f83\u9ad8\uff0c\u4f46\u4e0d\u5982\u84b8\u53d1\u8fc7\u7a0b\u7684\u6c89\u79ef\u901f\u7387\u9ad8\uff08\u5728\u5148 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