{"id":657,"date":"2018-11-28T16:43:34","date_gmt":"2018-11-28T08:43:34","guid":{"rendered":"http:\/\/localhost\/theme20\/?p=657"},"modified":"2023-12-12T09:31:52","modified_gmt":"2023-12-12T01:31:52","slug":"hppms%e5%a4%a7%e5%8a%9f%e7%8e%87%e8%84%89%e5%86%b2%e7%a3%81%e6%8e%a7%e6%ba%85%e5%b0%84","status":"publish","type":"post","link":"https:\/\/www.naxauam.com\/hppms%e5%a4%a7%e5%8a%9f%e7%8e%87%e8%84%89%e5%86%b2%e7%a3%81%e6%8e%a7%e6%ba%85%e5%b0%84\/","title":{"rendered":"HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04PVD\u6d82\u5c42\u6280\u672f"},"content":{"rendered":"<p>\u9ad8\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04\uff08HPPMS\uff09\uff0c\u4e5f\u79f0\u4e3a\u9ad8\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04\uff08HIPIMS\uff09\u662f\u57fa\u4e8e\u78c1\u63a7\u6e85\u5c04\u6c89\u79ef\u7684PVD\u6d82\u5c42\u6280\u672f\u3002HPPMS\u5229\u7528kW \/ cm <sup>2<\/sup>\u91cf\u7ea7\u7684\u6781\u9ad8\u529f\u7387\u5bc6\u5ea6\u5728\u5c0f\u4e8e10\uff05\u7684\u4f4e\u5360\u7a7a\u6bd4\uff08\u5f00\/\u5173\u65f6\u95f4\u6bd4\uff09\u4e0b\uff0c\u4ee5\u6570\u5341\u5fae\u79d2\u7684\u77ed\u8109\u51b2\uff08\u8109\u51b2\uff09\u4e3a\u5355\u4f4d\u3002HPPMS\u7684\u663e\u7740\u7279\u5f81\u662f\u6e85\u5c04\u91d1\u5c5e\u7684\u9ad8\u5ea6\u7535\u79bb\u548c\u5206\u5b50\u6c14\u4f53\u7684\u9ad8\u89e3\u79bb\u901f\u7387\uff0c\u8fd9\u5bfc\u81f4\u4e86\u6c89\u79ef\u819c\u7684\u9ad8\u5bc6\u5ea6\u3002\u7535\u79bb\u548c\u89e3\u79bb\u5ea6\u6839\u636e\u5cf0\u503c\u9634\u6781\u529f\u7387\u800c\u589e\u52a0\u3002\u8be5\u6781\u9650\u7531\u653e\u7535\u4ece\u8f89\u5149\u5230\u7535\u5f27\u76f8\u7684\u8fc7\u6e21\u786e\u5b9a\u3002\u9009\u62e9\u5cf0\u503c\u529f\u7387\u548c\u5360\u7a7a\u6bd4\uff0c\u4ee5\u4fdd\u6301\u7c7b\u4f3c\u4e8e\u5e38\u89c4\u6e85\u5c04\u7684\u5e73\u5747\u9634\u6781\u529f\u7387\uff081-10 W \/ cm\uff09\u3002<\/p>\n<p>HPPMS\u7528\u4e8e\uff1a<\/p>\n<ul>\n<li>\u5728\u6d82\u5c42\u6c89\u79ef\u4e4b\u524d\u5bf9\u57fa\u5e95\u8fdb\u884c\u7c98\u5408\u529b\u589e\u5f3a\u7684\u9884\u5904\u7406\uff08\u57fa\u5e95\u8680\u523b\uff09<\/li>\n<li>\u6c89\u79ef\u5177\u6709\u9ad8\u5fae\u7ed3\u6784\u5bc6\u5ea6\u7684\u6d82\u5c42<\/li>\n<\/ul>\n<p>HPPMS\u5728\u5f88\u77ed\u7684\u65f6\u95f4\u5185\uff08\u901a\u5e38\u4e3a\u301c100\u03bcs\uff09\u4f7f\u7528\u5411\u9634\u6781\u63d0\u4f9b\u7684\u5927\u80fd\u91cf\u8109\u51b2\u3002\u8fd9\u9700\u8981\u975e\u5e38\u4e0d\u540c\u7c7b\u578b\u7684\u7535\u6e90[1]\u3002HPPMS\u5de5\u827a\u53ef\u5c06\u8f83\u5927\u7684\u4f4e\u80fd\u91cf\u79bb\u5b50\u901a\u91cf\u4f20\u9012\u7ed9\u57fa\u677f\u3002\u7535\u6e90\u5fc5\u987b\u4ea7\u751f\u6700\u9ad83 MW \/\u8109\u51b2\u7684\u5cf0\u503c\u529f\u7387\uff0c\u8109\u51b2\u5bbd\u5ea6\u5728100\u5230150\u03bcs\u4e4b\u95f4\u3002\u5e73\u5747\u529f\u7387\u7ea6\u4e3a20 kW\uff0c\u9891\u7387\u9ad8\u8fbe500 Hz\u3002\u9664\u4e86\u63d0\u4f9b\u8109\u51b2\u529f\u7387\u5916\uff0c\u8fd8\u5fc5\u987b\u8fdb\u884c\u7535\u5f27\u6291\u5236\u3002\u8be5\u8fc7\u7a0b\u5229\u7528\u4e86\u9ad8\u80fd\u91cf\u8109\u51b2\u4ea7\u751f\u7684\u589e\u5f3a\u7535\u79bb\u7684\u4f18\u52bf\u3002\u65bd\u52a0\u81f3\u9776\u6750\u7684\u529f\u7387\u5bc6\u5ea6\u7ea6\u4e3a1 \u2013\u00a03 kW \/ cm\u00a0<sup>2<\/sup>\uff08\u4e0e\u529f\u7387\u5bc6\u5ea6\u7ea6\u4e3a1 \u2013 10 W \/ cm\u00a0<sup>2\u7684<\/sup>\u4f20\u7edf\u78c1\u63a7\u6e85\u5c04\u76f8\u6bd4\uff09[2]\u3002<\/p>\n<p>\u7531\u4e8e\u589e\u5f3a\u7684\u7535\u79bb\u4f5c\u7528\uff0c\u53ef\u4ee5\u4f7f\u7528HPPMS\u6765\u5b8c\u6210\u6676\u4f53\u819c\u7684\u751f\u957f\u4ee5\u53ca\u63a7\u5236\u5176\u76f8\u7ec4\u6210[3]\u3002\u6c89\u79ef\u6761\u4ef6\u540c\u6837\u5f88\u91cd\u8981\uff0c\u4f46\u662f\u7535\u6e90\u7684\u5360\u7a7a\u6bd4\u548c\u7b49\u79bb\u5b50\u4f53\u53c2\u6570\u4f3c\u4e4e\u6709\u52a9\u4e8e\u5f62\u6210\u6676\u4f53\u7ed3\u6784\u3002\u53d1\u73b0TiO\u00a0<sub>2<\/sub>\u7684\u91d1\u7ea2\u77f3\u76f8\u968f\u8109\u51b2\u5468\u671f\u800c\u589e\u52a0\uff0c\u968f\u5bc6\u5ea6\u968f\u8109\u51b2\u5e45\u5ea6\u800c\u964d\u4f4e[3]\u3002\u7136\u800c\uff0c\u5176\u4ed6\u7814\u7a76\u4eba\u5458\u6ca1\u6709\u770b\u5230\u8fd9\u79cd\u73b0\u8c61\uff0c\u4ec5\u83b7\u5f97\u4e86\u975e\u6676\u819c\uff0c\u800c\u6c89\u79ef\u4e86\u9ad8\u7ed3\u6676\u5ea6\u7684\u949b[4]\u3002HPPMS\u5df2\u6c89\u79ef\u4e86\u9ad8\u5ea6\u7ed3\u6676\u7684ITO\u819c\u3002<\/p>\n<p>\u7ed3\u679c\uff0cHPPMS\u6d82\u5c42\u5e94\u5177\u6709\u6539\u5584\u7684\u6469\u64e6\u5b66\uff0c\u5149\u5b66\uff0c\u7535\u5b66\u548c\u73af\u5883\u6027\u80fd\u3002\u6539\u5584\u7684\u5fae\u7ed3\u6784\u4e5f\u6539\u5584\u4e86\u5149\u5b66\u6027\u80fd[3,4,5-9]\u3002\u4f17\u6240\u5468\u77e5\uff0c\u6298\u5c04\u7387\u53d6\u51b3\u4e8e\u5149\u5b66\u6d82\u5c42\u7684\u5bc6\u5ea6\u3002\u5bc6\u5ea6\u8f83\u5c0f\u7684\u6d82\u5c42\u7684\u6298\u5c04\u7387\u901a\u5e38\u4f4e\u4e8e\u5bc6\u5ea6\u8f83\u9ad8\u7684\u6d82\u5c42\u3002TiO <sub>2<\/sub>\u6d82\u5c42\u662f\u4f9d\u8d56\u4e8e\u5bc6\u5ea6\u7684\u5b8c\u7f8e\u4f8b\u5b50\u3002\u8fd9\u79cd\u6750\u6599\u7684\u6298\u5c04\u7387\u53ef\u4ee5\u57282.2 \u2013 2.5\u4e4b\u95f4\u53d8\u5316\uff0c\u5177\u4f53\u53d6\u51b3\u4e8e\u5bc6\u5ea6\u3002\u636e\u62a5\u9053\uff0c\u4e0e\u76f4\u6d41\u78c1\u63a7\u6e85\u5c04\u819c\u76f8\u6bd4\uff0c\u7531HPPMS\u6c89\u79ef\u7684\u819c\u5177\u6709\u8f83\u9ad8\u7684\u6298\u5c04\u7387\uff0c\u5982\u56fe1\u6240\u793a[5]\u3002\u5728\u6574\u4e2a\u5149\u8c31\u4e0a\u6298\u5c04\u7387\u8f83\u9ad8\u3002\u8fd9\u4e9b\u6d82\u5c42\u7684\u5bc6\u5ea6\u4e5f\u4e3a3.83 g \/ cm <sup>3<\/sup>DC\u819c\u7684\u5bc6\u5ea6\u4e3a3.71 g \/ cm\u00a0<sup>3<\/sup>\uff0c\u8868\u9762\u7c97\u7cd9\u5ea6\u4e3a1.3 nm\uff0c\u8868\u9762\u7c97\u7cd9\u5ea6\u4ec5\u4e3a0.5 nm\u00a0\u3002\u5982\u679c\u4f7f\u7528\u7535\u6e90\u7684\u6700\u4f73\u5360\u7a7a\u6bd4\uff0c\u5219TiO\u00a0<sub>2\u6d82\u5c42<\/sub>\u7684\u6298\u5c04\u7387\u4e5f\u5f88\u9ad8\uff0c\u7ea6\u4e3a2.72\u00a0[3]\u3002\u6539\u5584SiO\u00a0<sub>2<\/sub>\uff0cZnO\uff0cAl\u00a0<sub>2<\/sub>\u00a0O\u00a0<sub>3<\/sub>\uff0cTa\u00a0<sub>2<\/sub>\u00a0O\u00a0<sub>5<\/sub>\u548cZrO\u00a0<sub>2\u7684<\/sub>\u5149\u5b66\u6027\u80fd\u7535\u5f71\u4e5f\u6709\u62a5\u9053[6,7,8]\u3002\u8fd9\u4e9b\u7ed3\u679c\u4ee4\u4eba\u5370\u8c61\u6df1\u523b\uff0c\u4f46\u5fc5\u987b\u6ce8\u610f\u67d0\u4e9b\u4e8b\u9879\u3002\u4e0e\u4f7f\u7528\u5176\u4ed6\u7535\u6e90\u6c89\u79ef\u7684\u6d82\u5c42\u76f8\u6bd4\uff0cHPPMS\u6d82\u5c42\u5e76\u4e0d\u603b\u662f\u5177\u6709\u6539\u8fdb\u7684\u6027\u80fd[10]\u3002\u5149\u5b66\u5e38\u6570\u603b\u662f\u5728\u5f88\u5927\u7a0b\u5ea6\u4e0a\u53d6\u51b3\u4e8e\u6c89\u79ef\u6761\u4ef6\uff0c\u5e76\u4e14\u5fc5\u987b\u4e3a\u6bcf\u79cd\u6750\u6599\u548c\u6c89\u79ef\u7cfb\u7edf\u786e\u5b9a\u6700\u4f73\u7684\u4e00\u7ec4\u6761\u4ef6\u3002\u6211\u770b\u5230\u5e73\u9762\u78c1\u63a7\u6e85\u5c04\u819c\u4e5f\u62a5\u9053\u4e86\u5f88\u9ad8\u7684\u6298\u5c04\u7387\u3002\u5b9e\u9645\u4e0a\uff0c\u5728\u67d0\u4e9b\u60c5\u51b5\u4e0b\uff0c\u4e2d\u9891\u78c1\u63a7\u6e85\u5c04\u6bd4HPPMS\u5177\u6709\u66f4\u597d\u7684\u6027\u80fd[8]\u3002<\/p>\n<figure id=\"attachment_290\" class=\"wp-caption alignnone\" aria-describedby=\"caption-attachment-290\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-290\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.1.png\" sizes=\"(max-width: 524px) 100vw, 524px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.1.png 524w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.1-300x220.png 300w\" alt=\"\" width=\"524\" height=\"384\" \/><figcaption id=\"caption-attachment-290\" class=\"wp-caption-text\">\u56fe1. HPPMS\u548c\u76f4\u6d41\u78c1\u63a7\u6e85\u5c04\u819c\u7684\u6298\u5c04\u7387\u6bd4\u8f83[5] 11\u3002<\/figcaption><\/figure>\n<p>HPPMS\u5de5\u827a\u7684\u53e6\u4e00\u4e2a\u4f18\u70b9\u5e94\u8be5\u662f\u6539\u5584\u5316\u5b66\u548c\u73af\u5883\u7a33\u5b9a\u6027\u3002\u94f6\u6d82\u5c42\u56e0\u7f3a\u4e4f\u5316\u5b66\u548c\u73af\u5883\u7a33\u5b9a\u6027\u800c\u81ed\u540d\u662d\u8457\uff0c\u7279\u522b\u662f\u975e\u5e38\u8584\u7684\u6d82\u5c42\u3002\u5c3d\u7ba1\u4ecd\u6709\u8bb8\u591a\u6d4b\u8bd5\u8981\u505a\uff0c\u4f46HPPMS\u6c89\u79ef\u7684\u94f6\u819c\u4f3c\u4e4e\u5728\u591a\u5c42\u7ed3\u6784\u4e2d\u5177\u6709\u66f4\u9ad8\u7684\u7a33\u5b9a\u6027\u548c\u5149\u5b66\u6027\u80fd[9]\u3002<\/p>\n<p>\u968f\u7740\u5bc6\u5ea6\u548c\u5149\u6ed1\u5ea6\u7684\u63d0\u9ad8\uff0c\u8be5\u5de5\u827a\u5177\u6709\u6539\u5584\u6469\u64e6\u6d82\u5c42\u6027\u80fd\u7684\u6f5c\u529b[11-15]\u3002\u5177\u6709\u81f4\u5bc6\u7684\u5fae\u89c2\u7ed3\u6784\u548c\u5149\u6ed1\u8868\u9762\u7684\u6d82\u5c42\u5728\u8bb8\u591a\u5e94\u7528\u4e2d\u662f\u4f18\u9009\u7684\uff0c\u56e0\u4e3a\u5b83\u589e\u52a0\u4e86\u8010\u8150\u8680\u548c\u8010\u78e8\u6027\uff0c\u5e76\u51cf\u5c11\u4e86\u6469\u64e6\u3002\u8bf8\u5982TiN\uff0cCrN <sub>x<\/sub>\uff0cCr\u00a0<sub>x<\/sub>\u00a0N\u00a0<sub>y<\/sub>\u548cTi\u00a0<sub>3<\/sub>\u00a0SiC\u00a0<sub>2\u7684<\/sub>\u786c\u8d28\u6750\u6599\u5747\u5df2\u901a\u8fc7HPPMS\u6c89\u79ef\u3002\u4e0e\u76f4\u6d41\u78c1\u63a7\u6e85\u5c04\u6c89\u79ef\u76f8\u6bd4\uff0cTiN\u6d82\u5c42\u5177\u6709\u975e\u5e38\u7ec6\u7684\u6676\u7c92\u7ed3\u6784[19]\u3002CrN\u6d82\u5c42\u751a\u81f3\u6bd4UBM\u6e85\u5c04\u6d82\u5c42\u5177\u6709\u66f4\u597d\u7684\u5fae\u89c2\u7ed3\u6784\u3002\u636e\u62a5\u9053\u786c\u5ea6\u503c\u63a5\u8fd125 GPa\uff0c\u6ed1\u52a8\u78e8\u635f\u7cfb\u6570\u4ece7\u964d\u4f4e\u52300.2 [15]\u3002<\/p>\n<p>HPePMS\u8fd8\u6c89\u79ef\u4e86VMeCN\u548cCrN \/ NbN\u6469\u64e6\u8d85\u6676\u683c\u6d82\u5c42[16,17]\u3002\u8fd9\u4e9b\u7ed3\u6784\u663e\u793a\u51fa\u65b0\u7684\u9ad8\u786c\u5ea6\u503c\u548c\u4f4eCOF\u3002TiAlCN \/ VCN\u8d85\u6676\u683c\u663e\u793a\u51fa\u8f83\u9ad8\u7684\u786c\u5ea6\u503c\uff08Hv = 2900 kg \/ 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class=\"wp-caption-text\">\u56fe3.\u7531\u76f4\u6d41\u78c1\u63a7\u7ba1\uff08a\uff09\u548cHPPMS\uff08b\uff09\u6c89\u79ef\u7684ITO\u819c\u7684\u7535\u963b\u7387\u548c\u5149\u5438\u6536\u7387\u7684\u6bd4\u8f83[22]\u3002<\/figcaption><\/figure>\n<hr \/>\n<p>\u8f6c\u81f3http:\/\/vtcmagblog.com\/<\/p>\n<h3>\u53c2\u8003\uff1a<\/h3>\n<ol>\n<li>D J Christie et al., 47th Annual Technical Conference of the Society of Vacuum Coaters (2004) 113.<\/li>\n<li>William D. Sproul, 50 years of Vacuum Coating Technology and the growth of the Society of Vacuum Coaters, Donald M. Mattox and Vivienne Harwood Mattox ed., Society of Vacuum Coaters (2007) 35.<\/li>\n<li>R Bandorf et al., 50th Annual Technical Conference of the Society of Vacuum Coaters (2007) 160.<\/li>\n<li>J A Davis et al., 47th Annual Technical Conference of the Society of Vacuum Coaters (2004) 215.<\/li>\n<li>K Sarakinos et al., Rev. Adv. Mater. Sci, 15 (2007) 44.<\/li>\n<li>S Konstantinidis et al., 50th Annual Technical Conference of the Society of Vacuum Coaters (2007) 92.<\/li>\n<li>W.D. Sproul, D.J. Christie, and D.C. Carter, 47th Annual Technical Conference of the Society of Vacuum Coaters (2004) 96.<\/li>\n<li>D A Glocker et al, Proceedings of the 48th Technical Conference of the Society of Vacuum Coaters (2005) 53.<\/li>\n<li>J Li, S R Kirkpatrick and S L Rohde, Presentation SE-TuA1, AVS 2007 Fall Technical Conference, October 14 \u2013 19, 2007, Seattle WA.<\/li>\n<li>D A Glocker et al., 47th Annual Technical Conference of the Society of Vacuum Coaters (2004) 183<\/li>\n<li>A P Ehiasarian et al., Proceedings of the 45th Technical Conference of the Society of Vacuum Coaters (2002) 328.<\/li>\n<li>J B\u00f6hlmark et al., Proceedings of the 49th Technical Conference of the Society of Vacuum Coaters (2006) 334.<\/li>\n<li>J Alami et al., Thin Solid Films 515 (4): 1731\u20131736.<\/li>\n<li>A P Ehiasarian et al., Surface and Coatings Technology 163-164: 267-272.<\/li>\n<li>J Paulitsch et al., Proceedings of the 50th Technical Conference of the Society of Vacuum Coaters (2007) 150.<\/li>\n<li>A P Ehiasarian et al, Proceedings of the 49th Technical Conference of the Society of Vacuum Coaters (2006) 349.<\/li>\n<li>W D Sproul, Proceedings of the 50th Technical Conference of the Society of Vacuum Coaters (2007) 591<\/li>\n<li>B M DeKoven et al. Proceedings of the 46th Technical Conference of the Society of Vacuum Coaters (2003) 158<\/li>\n<li>SE+PS-MoA1: R. Chistyakov, \u201cModulated Pulse Power Deposition ofNanometer-Scale Multilayered Coatings\u201d, presented at the 2008 AVS Fall Technical Conference, Seattle, WA, October 21, 2008.<\/li>\n<li>SE+PS-MoA3: A. Amassian et al., presented at the 2008 AVS Fall Technical Conference, Seattle, WA, October 21, 2008.<\/li>\n<li>P Eh Hovsepian et al., Proceedings of the 50th Technical Conference of the Society of Vacuum Coaters (2007) 602.<\/li>\n<li>V Sittinger et al., Proceedings of the 49th Technical Conference of the Society of Vacuum Coaters (2006) 343.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"<p>\u9ad8\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04\uff08HPPMS\uff09\uff0c\u4e5f\u79f0\u4e3a\u9ad8\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04\uff08HIPIMS\uff09\u662f\u57fa\u4e8e\u78c1\u63a7\u6e85\u5c04\u6c89\u79ef\u7684PVD\u6d82\u5c42\u6280\u672f\u3002 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